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Anisotropic Chemical Etching of III—V Crystals Dissolution Slowness Surface and Application to GaAs

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Author(s): C. R. Tellier | G. Huve | T. G. Leblois

Journal: Active and Passive Electronic Components
ISSN 0882-7516

Volume: 27;
Issue: 3;
Start page: 133;
Date: 2004;
Original page
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