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Artificial intelligence system for technical diagnostics of photomasks

Author(s): Kozina Yu. Yu. | Kozin A. A.

Journal: Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
ISSN 2225-5818

Issue: 1;
Start page: 7;
Date: 2012;
Original page

Keywords: photomask | artificial intelligence system | technical diagnostics | fiducial marks

The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to make a small-scale production profitable.
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