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Characterization of ZnO Nanorods and SnO2-CuO Thin Film for CO Gas Sensing

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Author(s): Woo-Chang Choi | Sung-Eun Kim | Jae-Hwan Lim | Jee-Youl Ryu | Hyung-Sin Moon

Journal: Transactions on Electrical and Electronic Materials
ISSN 1229-7607

Volume: 13;
Issue: 6;
Start page: 305;
Date: 2012;
Original page

Keywords: Carbon monoxide (CO) | ZnO nanorods | SnO2-CuO thin film | Gas sensor

ABSTRACT
In this study, ZnO nanorods and SnO2-CuO heterogeneous oxide were grown on membrane-type gas sensor platformsand the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms withbuilt-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grownfrom ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods wereadjusted by changing the concentration of the precursor. Thereafter, SnO2-CuO heterogeneous oxide thin films weregrown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing theconcentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21%at a working temperature of 350℃ and a carbon monoxide concentration of 100 ppm. The SnO2-CuO heterogeneousoxide thin films showed a sensitivity value of 18% at a working temperature of 200℃ and a carbon monoxideconcentration of 100 ppm.

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