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Cluster beam sources. Part 1. Methods of cluster beams generation

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Author(s): A.Ju. Karpenko | V.A. Baturin

Journal: Journal of Nano- and Electronic Physics
ISSN 2077-6772

Volume: 4;
Issue: 3;
Start page: 03015-1;
Date: 2012;
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Keywords: Cluster | Cluster ions | Cluster beams source | Molecular beams | Cluster formatio

ABSTRACT
The short review on cluster beams generation is proposed. The basic types of cluster sources are considered and the processes leading to cluster formation are analyzed. The parameters, that affects the work of cluster sources are presented.
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