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Cr ohmic contact on an Ar+ ion modified 6H-SiC(0001) surface

Author(s): Milosz Grodzicki | Jan Chrzanowski | Piotr Mazur | Stefan Zuber | Antoni Ciszewski

Journal: Optica Applicata
ISSN 0078-5466

Volume: 39;
Issue: 4;
Start page: 765;
Date: 2009;
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Keywords: silicon carbide | chromium | electric contacts | AFM

Chromium layers were vapor deposited under ultrahigh vacuum onto samples cut out of a single crystal of 6H-SiC(0001) that were Ar+ bombardment modified. The substrates and electrical contacts formed by the Cr adlayer were characterized in situ by current-sensing atomic force microscopy (CS-AFM) and X-ray photoelectron spectroscopy (XPS). Cr/SiC contacts reveal  a good I–V characteristic linearity without the use of heavy impurity doping and high-temperature annealing.
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