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Design Considerations for a Micromachined Proportional Control Valve

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Author(s): Maarten S. Groen | Dannis M. Brouwer | Remco J. Wiegerink | Joost C. Lötters

Journal: Micromachines
ISSN 2072-666X

Volume: 3;
Issue: 2;
Start page: 396;
Date: 2012;
Original page

Keywords: microvalve | flow control | low leakage | mass flow controller | micro actuator | MEMS

ABSTRACT
Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.
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