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Design and Development of Millimeter-Wave Micromachined Patch Antennas

Author(s): Sharma Preeti | Koul Shiban

Journal: IETE Journal of Research
ISSN 0377-2063

Volume: 55;
Issue: 1;
Start page: 40;
Date: 2009;
Original page

Keywords: Bulk micromachining | Micromachined patch antenna | RF sputtering.

In this paper, we report design, development and fabrication of high-performance Ka-band micromachined patch antennas using monolithic microwave integrated circuit (MMIC)-compatible process technology. The main emphasis of this paper is to use radio frequency (RF) sputtering as the potential metal-dielectric film deposition process for rapid prototyping of many antenna structures in the absence of access to a well-established MEMS foundry. The fabricated antennas exhibited 4%-5% of impedance bandwidth, which is much wider than the one fabricated on bulk high-index substrates.
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