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Design of Ultrasonic Transducer MEMS Model for Distance Measurement using Multiphysics

Author(s): Priyabrata Pattnaik, Jhansirani Jena, S.K.Pradhan, S. K. Kamilla, Mihir Narayan Mohanty

Journal: International Journal of Advanced Computer Research
ISSN 2249-7277

Volume: 3;
Issue: 8;
Start page: 215;
Date: 2013;
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Keywords: COMSOL Multiphysics 4.2a | Lead free materials | piezoelectric thin film. MEMS .

The technique in artificial ultrasonic transducerusing electronicsisvery bulky and power hungry.We switched over to ultrasonic Micro-ElectronicsMechanical Systems (MEMS) whichhaveshownsignificant importance for miniaturized mechanicalsystem, basedon silicon technology. MEMS basedacoustic sensing transducers commonly employ thepiezo-electrictechnologyto interpret the receivedultrasonic reflection. Prior to fabrication of MEMSdevice design simulationsare extensively neededtoavoid expensivetime and cost. Theaimof thepresent work is to describe the design of differentlead free piezoelectric materials based ultrasonictransducer and their performance. COMSOLMultiphysics 4.2a is versatile tool and is used todesign and solve the transducer device with 3Dpartial differential equations. In this paper, 2D axis-symmetry model geometry of piezoelectrictransducer was designed with lead free piezoelectricmaterial like Barium Sodium Niobate(Ba2NaNb5O15) which is capable of being used asthin film. The potential of 20 Volts with 140 KHzfrequency was applied to thedevicethatwas insidegeometry of cylindrical air medium. The surfaceand radial displacement of the transducer structureof the material with pressure and stresswerestudiedin airmedium.
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