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The Development of Ion Nano-beams - A Review

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Author(s): S. Kalbitzer | V. A. Zhukov

Journal: Applied Physics Research
ISSN 1916-9639

Volume: 4;
Issue: 1;
Date: 2012;
Original page

ABSTRACT
With the advent of the super-tip ion source very favourable conditions for generating ion nano-beams have been provided. The basic physical principles for a super-tip-gas field ion source are described As a consequence of a very small source emittance of ? ~ 10-24 m2sr ultra-bright rare gas ion beams of about 1016 A/m2.sr can be produced. As a further consequence, very narrow probe sizes are obtainable, of dp< 1 nm, with spatial resolutions far below the classical limits of light-optics and even below the novel stimulated-emission-depletion microscopy [*STED (microscopy) = stimulated emission depletion (microscopy) Th. A. Klar, S. W. Hell, Opt.Lett. 24 (1999) 954-956]. Various ion-nanobeam applications in both materials modification, and analysis are envisaged.
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