Author(s): P.A. Litvinov | V.A. Baturin
Journal: Journal of Nano- and Electronic Physics
ISSN 2077-6772
Volume: 1;
Issue: 2;
Start page: 48;
Date: 2009;
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Original page
Keywords: Discharge Chamber | Glow Discharge | Positive Ions | Ion Beam | Ion Source
ABSTRACT
Design of the discharge system with electron oscillations in the emission region for the positive ion source was studied. Realization of the conditions for electron oscillation in the emission region of the electrode system allowed to increase the energy efficiency of a glow discharge. Obtained characteristics of the discharge with electron oscillation in the emission region of the discharge chamber allow to conclude about possibility of its application in the positive ion source operating at low pressure in the discharge chamber.
Journal: Journal of Nano- and Electronic Physics
ISSN 2077-6772
Volume: 1;
Issue: 2;
Start page: 48;
Date: 2009;
VIEW PDF
DOWNLOAD PDF Original pageKeywords: Discharge Chamber | Glow Discharge | Positive Ions | Ion Beam | Ion Source
ABSTRACT
Design of the discharge system with electron oscillations in the emission region for the positive ion source was studied. Realization of the conditions for electron oscillation in the emission region of the electrode system allowed to increase the energy efficiency of a glow discharge. Obtained characteristics of the discharge with electron oscillation in the emission region of the discharge chamber allow to conclude about possibility of its application in the positive ion source operating at low pressure in the discharge chamber.
