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An Improved SPICE Model for MEMS Based Capacitive Accelerometers

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Author(s): C. Kavitha | M. Ganesh Madhan

Journal: Journal of Nano- and Electronic Physics
ISSN 2077-6772

Volume: 5;
Issue: 2;
Start page: 02011-1;
Date: 2013;
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Keywords: Squeezed film | Capacitive accelerometer | Thermal effect | Damping | Electrical attractive forc

ABSTRACT
An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transient and frequency response analysis are carried out at temperature and pressure ranges of 100 K to 400 K and 30 to 3000 Pa respectively. The effect of these parameters on the resonance frequency, peak displacement and settling time of the accelerometer are determined. Simulations are performed using PSpice® circuit simulator.
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