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Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser

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Author(s): Ales Babnik

Journal: Maejo International Journal of Science and Technology
ISSN 1905-7873

Volume: 7;
Issue: 01;
Start page: 48;
Date: 2013;
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Keywords: laser processing | excimer laser | mask-projection technique | glass micro-drilling | hole geometry

ABSTRACT
We study the influence of a laser beam’s image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the hole’s tapering and final depth. Holes with exit diameters up to 10 times smaller than the mask-image diameter are produced in the case of perforation during the appropriate process phase determined by the formation of the plasma plume.
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