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Innovative MEMS Voltage-to-Frequency Converter using Cascaded Transducers

Author(s): Amir J. Majid

Journal: International Journal of Engineering and Technology
ISSN 2049-3444

Volume: 2;
Issue: 9;
Start page: 1639;
Date: 2012;
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Keywords: MEMS | sensors | actuators | transducers | v/f

Voltage-to-frequency (v/f) is often used in communication applications such as tuning circuits and FM systems. With the wide range of Tx/Rx IC devices used in wireless telemetry, as well as the shrinkage of their sizes; a MEMS v/f converter is proposed by implementing multi-stage MEMS sensors and actuators of different types, such as voltage-to-force, force-to-pressure, pressure-to-capacitance and an appropriate capacitance tunable circuit to generate a pulse train of frequency.
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