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Interaction of SF6 Multiple PhotonDissociation Products With Siliconand SiO2 Surfaces

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Author(s): Yu. A. Gorokhov | A. L. Gritsenko | V. N. Lokhman

Journal: Laser Chemistry
ISSN 0278-6273

Volume: 5;
Issue: 1;
Start page: 35;
Date: 1984;
Original page

Tango Rapperswil
Tango Rapperswil

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