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Investigation of the Carbon Monoxide Gas Sensing Characteristics of Tin Oxide Mixed Cerium Oxide Thin Films

Author(s): Sardar M. A. Durrani | Mohammad F. Al-Kuhaili | Imran A. Bakhtiari | Muhammad B. Haider

Journal: Sensors
ISSN 1424-8220

Volume: 12;
Issue: 3;
Start page: 2598;
Date: 2012;
Original page

Keywords: thin film | AFM | XPS | CeO2 | SnO2 | CO sensor | semiconductor gas sensor

Thin films of tin oxide mixed cerium oxide were grown on unheated substrates by physical vapor deposition. The films were annealed in air at 500 °C for two hours, and were characterized using X-ray photoelectron spectroscopy, atomic force microscopy and optical spectrophotometry. X-ray photoelectron spectroscopy and atomic force microscopy results reveal that the films were highly porous and porosity of our films was found to be in the range of 11.6–21.7%. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. We found that 430 °C was the optimum operating temperature for sensing CO gas at concentrations as low as 5 ppm. Our sensors exhibited fast response and recovery times of 26 s and 30 s, respectively.

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