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Investigation on MEMS-based Piezoelectric Energy Harvester Design with Aspect of Autonomous Automobile Sensors

Author(s): M.S. Bhuyan | Masuri Othman | Sawal Hamid Md Ali | Burhanuddin Yeop Majlis | Md. Shabiul Islam

Journal: Asian Journal of Scientific Research
ISSN 1992-1454

Volume: 6;
Issue: 1;
Start page: 1;
Date: 2013;
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Keywords: microelectromechanical system | energy harvesting | complementary metal-oxide semiconductor | Automotive sensors | ultra-low-power electronics | wafer-level fabrication

Exponential progress in Microelectromechanical Systems (MEMS) miniaturization feasibility and ultra-low-power electronics to date, micro sensors require so small energy that may be simply harvested from sensors ambient environment. To power-up sensors, batteries and chemical fuel sources may be considered. However, it is impractical to power-up automotive sensors through wired means because they derive their self-worth through their distribution and mobility. Moreover, if battery is used, questions of lifetime, design complexity, costs etc arise. The key objective of our research was to design and fabricate a micro piezoelectric energy harvester for converting low-frequency vibrations into electrical power. In this review paper, we have investigated most recent micro piezoelectric harvesters at depth, with focus on design structure and output characteristics. Contrary to designs that follow cantilever structure to use the bending strain on the piezoelectric beam, a novel design is required to be investigated as sensors power source instead of conventional batteries. As in automotive ambient environment, energy harvesting device will be in direct contact with driving force and ambient acceleration amplitudes will be large enough for previously reported cantilever based design. In this regards, this research will explore new geometries to utilize tensile stress/strain on piezoelectric film instead of cantilever bending strain. The harvester will be modeled in CoventorWare. To realize an efficient autonomous energy harvesting platform, it is also necessary to integrate ultra-low-power electronic circuitry with harvesting device. The electrical schematic will be simulated in Cadence Virtuoso Spectre. A short discussion on energy harvester under development followed by research methodology is presented.
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