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Mechanism and Conditions of Nanoisland Structures Formation by Vacuum Annealing of Ultrathin Metal Films

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Author(s): S.V. Tomilin | A.S. Yanovsky

Journal: Journal of Nano- and Electronic Physics
ISSN 2077-6772

Volume: 5;
Issue: 3;
Start page: 03014-1;
Date: 2013;
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Keywords: Thin film | Vacuum annealing | Diffusion | Nanoisland | SE

ABSTRACT
The paper presents theoretical and experimental results of studies of nanoisland metallic coatings on semiconductor substrates obtained by vacuum annealing of ultrathin solid films. It is shown experimentally that the formation of islet structure is possible only for films with thickness above a certain value. The study of surface morphology of the films was carried out using SEM.
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