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Methane Gas Sensing Properties of the Zinc Oxide Nanowhisker-derived Gas Sensor

Author(s): Hyung-Sin Moon | Sung-Eun Kim | Woo-Chang Choi

Journal: Transactions on Electrical and Electronic Materials
ISSN 1229-7607

Volume: 13;
Issue: 2;
Start page: 106;
Date: 2012;
Original page

Keywords: Gas sensor | Microheater | Zinc oxide | Nanowhiskers | Methane

A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. Inorder to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gassensor. The line width and gap of the microheater was 20 μm and 4.5 μm, respectively. Zinc oxide (ZnO) nanowhiskerarrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growingZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimumtemperature for highest sensitivity was found to be 250℃ although relatively high (64%) sensitivity was obtained evenat as low a temperature as 150℃. The power consumption was 72 mW at 250℃, and only 25 mW at 150℃.
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