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Modeling of the Response Time of Thermal Flow Sensors

Author(s): Safir Issa | Hannes Sturm | Walter Lang

Journal: Micromachines
ISSN 2072-666X

Volume: 2;
Issue: 4;
Start page: 385;
Date: 2011;
Original page

Keywords: modeling | thermal flow sensor | response time

This paper introduces a simple theoretical model for the response time of thermal flow sensors. Response time is defined here as the time needed by the sensor output signal to reach 63.2% of amplitude due to a change of fluid flow. This model uses the finite-difference method to solve the heat transfer equations, taking into consideration the transient conduction and convection between the sensor membrane and the surrounding fluid. Program results agree with experimental measurements and explain the response time dependence on the velocity and the sensor geometry. Values of the response time vary from about 5 ms in the case of stagnant flow to 1.5 ms for a flow velocity of 44 m/s.
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