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Power Transfer Efficiency in The Inductive RF Ion Source

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Author(s): V. Voznyi

Journal: Journal of Nano- and Electronic Physics
ISSN 2077-6772

Volume: 2;
Issue: 2;
Start page: 75;
Date: 2010;
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Keywords: RF Ion Source | Ion Beam | Plasma | Current Density

ABSTRACT
A radio-frequency inductive ion source without magnetic field was analyzed at driving frequency of 27,12 MHz. Diameter of the source discharge chamber is 3 cm, length is 8 cm. External electrical parameters of a source such as the coil current and the coil voltage were measured over a power range of 10÷400 W and gas (argon) pressures ranging from 0,1 to 1 Pa. The transformer model of an RF inductive discharge was applied to calculate the power transfer efficiency to plasma of the ion source. The power absorbed by plasma is determined to be 75 % in the generator power range 50÷400 W at the gas pressure of 0,5 Pa.
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