Author(s): TONG Bei, YANG Xiao-Fei, LIN Geng-Qi, CHEN Shi, OUYANG Jun
Journal: Journal of Inorganic Materials
ISSN 1000-324X
Volume: 28;
Issue: 9;
Start page: 982;
Date: 2013;
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Original page
Keywords: RF magnetron sputtering; composite film; annealing; converse magnetoelectric
ABSTRACT
AlN/FeCoSiB magnetoelectric (ME) composite films were prepared by RF magnetron sputtering successfully. The influences of annealing on piezoelectric property of AlN film and magnetic property of FeCoSiB film were discussed. The converse magnetoelectric (CME) response was investigated in detail. The results demonstrate that after annealing at 500¡æ, the AlN film possesses the highly (002) preferred orientation and typical columnar microstructure. Pronounced magnetic field sensitivity of FeCoSiB film is improved greatly through annealing at 300¡æ. The CME coefficient (αCME) reaches the maximum of 62.5 A/(m·V) at the bias magnetic field (Hdc) of 875 A/m. In addition, the magnetic induction (B) has an excellent linear relationship to the driven AC voltage (Vac) (Linearity of 1.3%). These make the AlN/FeCoSiB ME composite films exhibit promising potential in magnetic and electric field detecting application.
Journal: Journal of Inorganic Materials
ISSN 1000-324X
Volume: 28;
Issue: 9;
Start page: 982;
Date: 2013;
VIEW PDF
DOWNLOAD PDF Original pageKeywords: RF magnetron sputtering; composite film; annealing; converse magnetoelectric
ABSTRACT
AlN/FeCoSiB magnetoelectric (ME) composite films were prepared by RF magnetron sputtering successfully. The influences of annealing on piezoelectric property of AlN film and magnetic property of FeCoSiB film were discussed. The converse magnetoelectric (CME) response was investigated in detail. The results demonstrate that after annealing at 500¡æ, the AlN film possesses the highly (002) preferred orientation and typical columnar microstructure. Pronounced magnetic field sensitivity of FeCoSiB film is improved greatly through annealing at 300¡æ. The CME coefficient (αCME) reaches the maximum of 62.5 A/(m·V) at the bias magnetic field (Hdc) of 875 A/m. In addition, the magnetic induction (B) has an excellent linear relationship to the driven AC voltage (Vac) (Linearity of 1.3%). These make the AlN/FeCoSiB ME composite films exhibit promising potential in magnetic and electric field detecting application.