Academic Journals Database
Disseminating quality controlled scientific knowledge

Roughness characterization of well-polished surfaces by measurements of light scattering distribution

ADD TO MY LIST
 
Author(s): Zheng Zhenrong | Zhou Jing | Gu Peifu

Journal: Optica Applicata
ISSN 0078-5466

Volume: 40;
Issue: 4;
Start page: 811;
Date: 2010;
VIEW PDF   PDF DOWNLOAD PDF   Download PDF Original page

Keywords: light scattering | roughness | bidirectional reflectance distribution function (BRDF)

ABSTRACT
According to vector scattering and scalar scattering theory, the relationship of BRDF (bidirectional reflectance distribution function) of light scattering from micro-rough surface with TIS (total integrated scattering) is analyzed. Roughness statistical characterization such as RMS (root mean square), PSD (power spectral density) function are deduced by TIS of polished surface. Based on the light scattering measurement theory, an automatic measure system of light scattering with one dimensional scanning method is built, BRDF of two kinds of polished surfaces (silica surface and Ag reflector) have been measured. PSD of two surfaces has been given by light scattering measurements, roughness characterization of two surfaces has been compared with the data tested by profile meter. The results show that the light scattering measurement method has great application prospects as regards nondestructive measurement for polishing surfaces.
Affiliate Program     

Tango Rapperswil
Tango Rapperswil