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Software and Hardware System for the Investigation of the Thin Film Optical Properties

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Author(s): M.G. Demydenko | S.I. Protsenko | K.V. Tyschenko | O.V. Fedchenko

Journal: Journal of Nano- and Electronic Physics
ISSN 2077-6772

Volume: 4;
Issue: 2;
Start page: 02038;
Date: 2012;
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Keywords: Null-ellipsometry | X-Ray reflectivity | Optical coefficients | Frenel equations | Genetic algorith

ABSTRACT
Using Torhlabs optical elements and graphic software development system LabVIEW 2010 the software and hardware automation system for the investigation of the optical properties of multilayer film systems was built. The joint genetic algorithm was suggested to process experimental data of Null-ellipsometry and X-ray reflectometry. It was shown that the proposed technique lets one simulate phase transitions, diffusion processes and interface blurring in multilayer film systems very accurate for different computational theoretic models.
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