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Undistorted 3D microstructures in SU8 formed through two-photon polymerization

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Author(s): Kris Ohlinger | Yuankun Lin | Zsolt Poole | Kevin P. Chen

Journal: AIP Advances
ISSN 2158-3226

Volume: 1;
Issue: 3;
Start page: 032163;
Date: 2011;
Original page

ABSTRACT
This paper presents the wavelength dependence of two-photon polymerization in SU-8 between 720-780 nm. The study is performed by microstructuring SU-8 through a single-shot exposure of SU-8 to 140 fs tunable laser pulses with 80 MHz repetition rate, or by laser direct writing. Two-photon absorption is closely related to one-photon absorption in pristine SU-8. By careful design of the neighboring micro-structures, or by varying wet-processing parameters during development, undistorted and unbended 3D micro-structures have been fabricated through direct laser writing.

Tango Jona
Tangokurs Rapperswil-Jona

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