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International Journal of Plasma Science and Engineering

ISSN: 1687--6245
Publisher: Hindawi Publishing Corporation


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Etch Defect Characterization and Reduction in Hard-Mask-Based Al Interconnect Etching

Author(s): Hong-Ji Lee | Che-Lun Hung | Chia-Hao Leng | Nan-Tzu Lian | Ling-Wu Young | Tahone Yang | Kuang-Chao Chen | Chih-Yuan Lu
Volume: 2008
Year: 2008
Hollow Cathode and Low-Thrust Extraction Grid Analysis for a Miniature Ion Thruster

Author(s): Richard Wirz | Regina Sullivan | JoHanna Przybylowski | Mike Silva
Volume: 2008
Year: 2008
FFT Analysis of a Series Loaded Resonant Converter-Based Power Supply for Pulsed Power Applications

Author(s): R. B. Jadeja | S. A. Kanitkar | Anurag Shyam
Volume: 2008
Year: 2008
Mass-Charge and Energy Spectra of Oxygen Ions in a Two-Element Laser-Produced Plasma

Author(s): R. T. Khaydarov | U. S. Kunishev
Volume: 2008
Year: 2008
Microstructures Formation by Fluorocarbon Barrel Plasma Etching

Author(s): A. El amrani | R. Tadjine | F. Y. Moussa
Volume: 2008
Year: 2007
Observation and Modeling of Optical Emission Patterns and Their Transitions in a Penning Discharge

Author(s): C. C. Klepper | R. C. Hazelton | F. Barakat | M. D. Keitz | J. P. Verboncoeur
Volume: 2008
Year: 2007
Propagation of TE-Surface Waves on Semi-Bounded Quantum Plasma

Author(s): B. F. Mohamed | M. Abdel Aziz
Volume: 2010
Year: 2010
Study of Possible Obstacles Preventing Obtaining a Tokomak Regime in the Egyptian Machine

Author(s): H. Hegazy | F. Diab | K. Abd El-Aziz | Yu. V. Gott | M. M. Dremin
Volume: 2010
Year: 2010
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