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Design, Manufacturing and characterization of integrated inductors with magnetic layers for DC-DC converter

Author(s): Ali Siblini

Journal: Advanced Electromagnetics
ISSN 2119-0275

Volume: 1;
Issue: 2;
Start page: 58;
Date: 2012;
Original page

Keywords: inductor | photolithography | YIG | thin films | magnetic layer | RF sputtering | simulation

This paper presents the conception, fabrication and characterization of integrated inductors containing magnetic layers. We require different steps of micro-technologies: preparation of glass and ferrite substrates, RF sputtering, photolithography, etching and finally electroplating techniques for copper and gold films. The geometrical magnitudes are determined by using HFSS simulator software. The measurements performed at low and high frequencies (up to 1 GHz) permit to verify the correlation between experiment and simulation results. The inductance of the manufactured spiral inductor is ‚Äč‚Äčabout 200 nH and it is constant from low frequency up to 0.9 GHz.
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