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Mechanical Vibrations of Thermally Actuated Silicon Membranes

Author(s): Ivan Puchades | Mustafa Koz | Lynn Fuller

Journal: Micromachines
ISSN 2072-666X

Volume: 3;
Issue: 2;
Start page: 255;
Date: 2012;
Original page

Keywords: MEMS | thermal actuation | thermal vibration | vibration mode

A thermally-actuated micro-electro-mechanical (MEMS) device based on a vibrating silicon membrane has been proposed as a viscosity sensor by the authors. In this paper we analyze the vibration mode of the sensor as it vibrates freely at its natural frequency. Analytical examination is compared to finite element analysis, electrical measurements and the results obtained through real-time dynamic optical surface profilometry. The vertical movement of the membrane due to the applied heat is characterized statically and dynamically. The natural vibration mode is determined to be the (1,1) mode and good correlation is found between the analytical predictions, the simulation analysis, the observed mechanical displacement and the electrical measurements.
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